Interrelated Channel Current and Oxide Leakage Current Density in a MOSFET Device
DOI:
https://doi.org/10.14738/aivp.125.17525Keywords:
MOS device, Fowler-Nordheim tunnelling, MOSFET, Effective massesAbstract
This research paper discusses the observed lower Fowler-Nordheim (FN) onset electric field in the thermal SiO2 grown on the (110) surface of the 4H-SiC semiconductor than on the (0001) oriented surface. This forms the metal-oxide-semiconductor (MOS) device which is the essential part of the MOSFET device as a transistor. First, the FN onset field is revised to a new value of 4.6 MV/cm, and then the mechanism for the lowering of the field is described.
References
T. Nakanuma, T. Kobayashi, T. Hosoi, M. Sometani, M. Okamoto, A. Yoshigoe, T. Shimura, H. Watanabe, Impact of nitridation on the reliability of 4H-SiC (1120) MOS device, Applied Physics Express, 2022. 15, 041002.
R.K. Chanana, N-channel 4H-SiC MOSFET device on (1120) oriented epitaxial surface, IOSR-J of Electrical and Electronics Engineering, 2022. 17(3), p. 20-22.
N.T. Son, W.M. Chen, O. Kordina, A.O. Konstantinov, B. Monemar, E. Janzen, D.M. Hofman, D. Volm, M. Drechsler, B.K. Meyer, Electron effective masses in 4H-SiC, Appl. Phys. Lett., 1995. 66(9), p. 1074-1076.
N.T. Son, P.N. Hai, W.M. Chen, C. Hallin, B. Monemar, E. Janzen, Hole effective masses in 4H-SiC, Physical Review B, 2000. 61(16), p. R10544-546.
R.K. Chanana, Variation of saturated drift velocity of electrons in silicon with temperature, Journal of Research in Engineering and Computer Sciences, 2024. 2(4), p. 38-40.
H. Yano, T. Hirao, T. Kimoto, H. Matsunami, K. Asano, Y. Sugawara, High channel mobility in inversion layers of 4H-SiC MOSFET’s by utilizing (1120) face, IEEE Electron Device Letters, 1999. 20(12), p. 611-613.
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